Plasma (Dry) Etch Tools

Instrument/ServiceType:

Reactive Ion Etcher & Inductively Coupled Plasma Etcher

Make/ Model:

PlasmaTherm 540/790 & STS LPX-ICP

Instrument Description:

For anisotropic & high aspect ratio deep etch

Instrument Website URL:Ìý

Primary Contact:

Tzu-Min Ou Ìý Ìý ÌýÌý

Email: cnl@colorado.edu

Instrument Location:

Engineering Center, room ECEE271