AXIC PlasmaSTAR Reactive Ion Etcher

Instrument/ServiceType:

Reactive Ion Etcher

Make/ Model:

AXIC PlasmaSTAR

Instrument Description:

Used for dry etching and ashing.

Keywords for the Instrument:

Plasma Cleaning, Etching, Ashing

Instrument Website URL:

Primary Contact Name:

David Alchenberger

Email:alchenbd@jila.colorado.edu

Phone 303.492.2389

Home Department/Institute:

JILA

Home Facility:

JILA Keck Lab

Instrument Location:

JILA X121D

Instrument Availability to Campus Users:

Open on a case-by-case basis to the university users outside of the home department

Instrument Availability to External Academic and National Lab Users:

Open on a case-by-case basis to academic and national lab users