The annual American Vacuum Society (AVS) Symposium is being held this week. The conference听starting听yesterday, Nov. 6th,听and running听through Friday, Nov. 11th, is being held in Nashville, TN, also known as Music City, USA. Several George group members will be in attendance, giving talks at the symposium. A schedule of group member talks follows.听
Steve George will be giving a talk on Tuesday at 8:20 am in the Thin Film Advanced ALD Processsing session 迟颈迟濒别诲听Growth of Silicon Films at Room Temperature Using Electron Enhanced Atomic Layer Deposition. This work was primarily headed by 5th year graduate student Jaclyn Sprenger.听Steve will be giving a second talk during this session 迟颈迟濒别诲听Spatial MLD of Polyamide Films on Flexible Substrates using a New Rotating Cylinder Reactor in a Custom Oven听at 11:40 am. This work was primarily headed by former graduate student and postdoc Daniel Higgs.听
During the Thin Film session on Photovoltaics, postdoc Diane Lancaster听will be giving a talk on her work, 迟颈迟濒别诲听Controlling the Composition of Zn(O,S) Alloys Grown by Atomic Layer Deposition, at 5 pm on Tuesday.
Finally, on Wednesday during the Thin Film Atomic Layer Etching session, postdoc听Amy Marquadt and graduate student听Nicholas Johnson听will be giving talks at 11:40 am and 12 pm, respectively. Amy's talk is on the Conformality of Thermal Al2O3听Atomic Layer Etching in High Aspect Ratio Structures. Nick's talk is on听Thermal Atomic Layer Etching of Crystalline Aluminum Nitride Using Sequential, Self-Limiting HF and Sn(acac)2听Reactions and Enhancement by H2听and Ar Plasmas.
Find more information about the conference, and abstracts for these talks . Look for us at AVS 2016!
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